EUFANET 2001

Front side / Back side. Software enhancement. COMPUTER AIDED TOOLS FOR FA : NAVIGATION / BITMAP ( full integrated ). Behavioral simulation / diagnostic.
95KB taille 13 téléchargements 417 vues
EUFANET 2001

RCCAL ROUSSET CENTRAL ANALYSIS & CHARATERIZATION LAB.

RCCAL PRESENTATION CUSTOMERS : MCD DIV MEMORY DIV SMARCARD DIV 6 ’’ PLANT ( included R&D ) 8 ‘’ PLANT ( included R&D )

FA FLOW :

Operational Team

R C C A L

Electrical analysis & navigation tools Physical analysis & characterization Electrical characterization

RCCAL CAPABILITY 30 permanent people Physical Characterization & Analysis : 3 SEM ( HITACHI 4000/4700/5000 ) 1 FIB ( FEI 800 ) Electrical Analysis & Navigation tools SELA MICROCLIVAGE 2 IDS ( SLB 3000/10000DA ) / 1 precision prober AFM ( VEECO D3100 ) 2 EMMI ( visionary 2000 / Phemos 1000 ) OPTICAL + CHEMICAL 1 FIB ( SLB P2X ) Backend tools ( SAM .. ) PCB Writer ( PROTOMAT C60 ) TESTER ( IMS XL 60 ) NAVIGATION ( SLB / KNIGHTS full integration ) Available on : IDSs / FIBs

Electrical Characterization : 16 BENCHS ( PROBER + TEST PARAMETER )

:

TOOLS ROADMAP Physical Characterization & Analysis : TEM ( update to improve observation/chemical capability ) PLASMA ETCHER ( Full 8’’ ) UV CFC OPTICAL MICROCOPE ( high precision stage ) BACKSIDE SAMPLE PREPARATION

Electrical Analysis & Navigation tools : FIB ( update to advance design modification ) TESTER ( update to answer new product characteristics ) PROBER + LASER + thermal imaging ( dedicated tools ) NAVIGATION : Phemos 1000 / H4700 / Optical Microscope

Electrical Characterization : 2 BENCH ( 1 dedicated to modeling )

METHODOLOGY ROADMAP TEM sample prep for monitoring application BACKSIDE preparation MAPPING TECHNIQUE FOR FA : EMMI / THERMAL / Voltage Contrast OBIC / OBIRCH / EBIC Front side / Back side Software enhancement

COMPUTER AIDED TOOLS FOR FA : NAVIGATION / BITMAP ( full integrated ) Behavioral simulation / diagnostic Failure / Fault Simulation