Investigating Sequential Vapor Infiltration Synthesis on Block ...

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Investigating Sequential Vapor Infiltration Synthesis on Block Copolymer Templated Titania Nanoarrays Olga M. Ishchenkoa,b, Sivashankar Krishnamoorthya*, Nathalie Vallea, Jérôme Guillota, Philippe Turekc,d, Ioana Fecheteb, Damien Lenoblea* a

Luxembourg Institute of Science and Technology (LIST), Materials Research and

Technology (MRT), 41 rue du Brill, L-4422, Belvaux, Luxembourg b

Institut de Chimie et Procédés pour l’Energie, l’Environnement et la Santé (ICPEES), UMR

7515 CNRS, Université de Strasbourg, 25 rue Becquerel, 67087 Strasbourg Cedex 2, France c

Institut de Chimie, UMR 7177 CNRS - Université de Strasbourg, 1 rue Blaise Pascal, 67008

Strasbourg Cedex, France d

International Center for Frontier Research in Chemistry (Fondation IcFRC), 8 allée Gaspard

Monge, F-67000 Strasbourg, France

Figure S1. Reversed micellar film: a) AFM image of PS-b-P2VP b) SEM image of PS-bP2VP.

Figure S2. Calibration of TiO 2 deposition by ALD

Table S1. Quantitative XPS analysis of sample exposed to 25 cycles in mode II, just after exposure and after two weeks ageing.

Figure S3. SIMS profile of samples exposed to 400 cycles in mode II (without water).

Figure S4. SIMS profiles of Ti Si and O for samples after exposure to 200 and 400 cycles in mode I.