The noise level is shifted to mid range of the data acquisition apparatus. Any increase or decrease in the reflectance cause by LVP modulation is detected darker.
LVP Signal – Where to Probe? Modulation Mapping or LVI Herve Deslandes, DCG Systems
EUFANET - Jan 26 2009
LVP signal origin Laser beam is focused on the DUT (through the backside) Gets reflected at many different interfaces
main interfaces:
1 drain-well junction 2 channel area 3 well-substrate interface
LVP signal origin Modulation of the reflected light due to different switching states Inversion channel charge carrier density Depleting space charge region off state
on state – saturation
Note: E-Fields in devices are contributing two orders of magnitude lower signal than free carrier effects!
Amplitude modulation detection
Phase interference detection scheme
Proof of LVP signal origin Modulation mapping is used to show the origin of LVP signal
LSM image
D
G
S
Joint work between TU Berlin and DCG
Modulation map
D
G
S
modulation map for Vg=Vd=1.2V pulsed
Different Wavelength and Device z
NFET 1319nm
z
PFET 1319nm
z
NFET 1064nm
z
PFET 1064nm
ModMap on Inverter Chain LSM image
Modulation Map
z z
z
Chain
P N
A slight different setup is used in this modulation map. The noise level is shifted to mid range of the data acquisition apparatus. Any increase or decrease in the reflectance cause by LVP modulation is detected darker or brighter pixels in the modulation map. In this simple case, it is observed that -
The PMOS and NMOS have opposite polarity as expected. The inverted states between the adjacent stages of the inverters in a particular chain.
Probe the inverter chain using LVP tool LSM image with probe placement
Waveforms
ModMap on SOI Devices LSM image
Modulation Map
ModMap on Diode Structure LSM image
N P
Modulation Map
Probe the Signal! z
Once modulation map pinpoints activity in the transistor of interest, waveform acquisition can done!
CONCLUSION z
z z
Modulation mapping or Laser Voltage Imaging can be used to show electrical activity on the DUT Same setup can be used to perform LVP at relatively low bandwidth (few GHz) Dedicated tools provide much higher bandwidth (20 GHz) like DCG Ruby
Various (voltage, current, bandwidth, distortion, noise â¦) .... Post processing of the data (could be quite real time with very slow ... Channel 2: V(t) + signal analysis.
To describe a comprehensive overview of fault site localization technique by imaging with Nanoprobes. Resistive Contrast Imaging (RCI). Voltage DIstribution ...
FIB Micro-pillar sampling of Si devices and its 3D observation. T. Yaguchi, T. ... Introduction. New materials such as electronic and semiconductor devices.
Front side / Back side. Software enhancement. COMPUTER AIDED TOOLS FOR FA : NAVIGATION / BITMAP ( full integrated ). Behavioral simulation / diagnostic.
... Stimulation / Soft defect localization. ⢠IR Thermography ... Non destructive analysis ... Region Of Interest ? - Can you still test your product after preparation ?
needle stage, the geometry of the original specimen is not a limiting factor for ... Figure 4 shows a schematic flow for the FIB micro-pillar sample preparation ...
an AND-OR-INVERT. ... the area calculations, or modify the delay cost and .... "Logic Decomposition Algorithms for the Time Optimization of Multi-Level Logic", p.
Hugo Bender(IMEC),Ronny Camp (Alcatel), Dick Verkleij (Philips), Ernst Demm(Infineon). ⢠ESREF 1998 in Copenhagen (EFUG meeting organised by Dick ...
Scanning Acoustic Microscopy usually used for detection of delamination extended for new applications: ⢠Detection of delaminated balls. ⢠Detection of cracks.
Gerald Beyer. â Ingrid De Wolf. â Ivan Ciofi. â Joke De Messemaeker. â Kris Vanstreels. â Michele Stucchi. â Myriam Van De Peer. â Olalla Varela Pedreira.
stress in Si which changes device performance. Transistor performance in TSV- proximity μ-raman. XRD (Synchrotron). Bowing. Thermal stability of. TSV.
Goal: Reach both dies without separating them, without damage on Cu wires and without acid leak. Methodology: 1. LASER cavity. 2. Wet chemical opening at ...
presented below : ASK (Amplitude Shift Keying), that is used for example in infrared remote controllers, and PSK. (standing for Phase Shift Keying), which is ...
ified version of the method proposed by Jang and Allebach [1]. Then the MTF is adaptively .... ter suited as it is more related to the physics of the measurement on the printing ..... Imaging Conference: Color Science and Engineering Systems, .... Ni
appearing at the receiver input are still orthogonal1. This property is of fundamental importance to two-dimensional modulation techniques like CAP because it ...
Jun 7, 1971 - 7.6.5 of Proakis and Salehi's book [1]. In particular, an error in the book's ... the carrier frequency fc is chosen such that the power spectral ...
