3. Capacitive pressure sensors - capacitor – usually differential -Deformation element = pre-strained metallic membrane – serves as grounded electrode -Range: ∆p = 1 mbar – 10 bar, total p up to 400 bar C1 C2 Glass
I OM p1
p2 K M
Differential capacitor with separating liquid
Pressure sensor with ceramic membranes 1- membrane 2 – central piece Al2O3 3 - hydraulic liquid 4 - electrodes 5 - temperature sensor
1 2 3 p1
0,1 %, max. 350°C Range 2,5 to 300 kPa
MEMS sensor sklo Glass
- combination of Si membrane and capacitive sensor
Feedback sensor with bellows - returning membrane to idle position through electrostatic force - range – up to 200 kPa
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Table 7.1. Minimum plate thickness for steam boilers. Boiler diameter. Minimum ...... The hydraulic press, having a working pressure of water as 16 N/mm2 and .... Compressed ..... diameter is to contain liquid at a pressure of 13.5 N/mm2. It is.