SIL for improved sensitivity and spatial resolution Herve Deslandes, DCG Systems
EUFANET - Jan 26 2009
Why is Sensitivity important? z
High resolution fault localization requires enough sensitivity at high magnification
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High Sensitivity is required to obtain/maintain “fault detectibility” for advanced technology nodes because Vdd keeps decreasing
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High Sensitivity is required for new dynamic applications
Example: Magnification and SNR (1) 100x
Let’s take the case where the signal is distributed over 1 pixel
25x
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100 150
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Emitter Signal = 150 This case assumes object size >> diffractionlimited spot size
1. S ∝ (NA/M)2 2. ∴ S reduced by ≈16x assuming same NA
Σ Signal = 150
Example: Magnification and SNR (2) 100x The noise is distributed like this… 15
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inherent property of signal detection, which cannot be reduced by design 15 15 15camera15 factors, it essentially represents a "noise floor" that is the minimum achievable 15 15 15 15 noise level
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Centroid
25x
15 is an 15 15 Because 15 photon noise
Emitter Signal = 150
15
FOV Noise = 240
S/N = 150 / 15 = 10
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FOV Noise = 240
Emitter Centroid within this Pixel S/N = > 10 1.3V, INT=60s SNR ≈ 10 0.9V, INT=60s SNR ≈ 5 ≈19 µm 0.8V, INT=60s 220x SIL (2.45NA) 1K InGaAs overlay image (cropped) of 140nm ring oscillator. 1.3V, INT = 60s. 100µm substrate thickness.
Sensitivity limit with SIL in 60s: 800mV (200mV better than 50x)
Sensitivity limit for each lens (1/3) z z z
Core Voltage is changed by 100mV steps Integration time is constant for each acquisition Device is about 100µm Si thick
50x – 1.2V Images courtesy of ST
Detection limit ≈ 0.8V No background subtraction provides better SNR but is less uniform
Sensitivity limit for each lens (2/3) STD SIL images
Images courtesy of ST
1x 20x 50x Mit 100x HR Std SIL LWD SIL
LN2 InGaAs 0.9V 0.9V 0.9V 0.9V 0.7V 0.7V
SIL is the most sensitive lens
Similar performance on another device
STD SIL image
Sensitivity limits
Image courtesy of ST
Resolution - 45nm images (1/2) 1x LWD SIL – 1.47 NA
20x
Images courtesy of ST Crolles
Resolution - 45nm images (2/2) LWD SIL
STD SIL
Images courtesy of ST Crolles
1.47NA 1.47NA 100um 100umSi Si ± 50um (works from 0um to 350um)
2.45NA 100um Si ± 50um
SIL for DLS applications Customer had an issue in a memory and stated that 100x was not giving him enough resolution The scan chain output pattern was monitored at a specific vector to determine pass or fail Scan out Monitoring this vector only
Device got killed just shortly after switching to 2.5x LSM zoom Images courtesy of Texas Instruments
SIL for Logic State Mapping The emission microscope is linked with the tester to take one emission image and then advance the tester to next vector and re-acquire image…
Tester: Vector + 1 Logical values for box #:1 2
1.5
100x images
Emission Logic value
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1
0.5
Logic states can then be measured for each vector. In this example, from vector 12344 to 12357
0
-0.5
-1
1.2344
1.2346
1.2348
1.235 1.2352 Vector number
1.2354
1.2356
1.2358 4
x 10
CONCLUSION z
SIL improvement for resolution. -
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Macro lens traditionally was the most sensitive lens -
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applies for higher pixel count camera with smaller pitch No longer true with SIL SIL is the most sensitive lens
SIL benefits both emission & LSM applications -
Be careful not to apply too much laser power
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Especially when using LSM optical zoom
New SILs in development will further improve performance without comprising ease of use
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